Power semiconductor devices incorporating single crystalline aluminum nitride substrate

ABSTRACT

The invention provides a power semiconductor device including an aluminum nitride single crystalline substrate, wherein the dislocation density of the substrate is less than about 10 5  cm −2  and the Full Width Half Maximum (FWHM) of the double axis rocking curve for the (002) and (102) crystallographic planes is less than about 200 arcsec; and a power semiconductor structure comprising at least one doped Al x Ga 1-x N layer overlying the aluminum nitride single crystalline substrate.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims priority to U.S. Provisional Application No.61/781,991, filed Mar. 14, 2013, which is herein incorporated byreference in its entirety.

FIELD OF THE INVENTION

The present invention relates to power semiconductor devicesincorporating an aluminum nitride single crystalline substrate layer.

BACKGROUND OF THE INVENTION

Power electronics semiconductor technology has made a tremendouscontribution to modern society by providing routine, high-qualityelectric power at dependable voltage, current and frequency, regardlessof load. Such devices are used as a switch or rectifier and can beclassified as two-terminal devices (e.g., diodes) or three-terminaldevices (e.g., triodes). Power semiconductor devices can also beclassified as a majority carrier device that uses only one type ofcharge carrier (electron or electron holes) and minority carrier devicesthat use both carrier types. Examples of majority carrier devicesinclude Schottky diodes, Junction Field Effect Transistors (JFET), andPower Metal Oxide Semiconductor Field Effect Transistors (MOSFET).Minority carrier devices include thyristors, Bipolar JunctionTransistors (BJT), PIN diodes, and Insulated Gate Bipolar Transistors(IGBT).

The electric utility infrastructure in the U.S. is transforming to addbetter control, better monitoring and intelligence to the transmissionand distribution of electric power. This future “smart grid” willprovide not just on-off control, but actual flow-control of electricpower in response to changing conditions and demand. The development ofimproved power control devices is a critical enabler for the smart grid.

Until recently, these types of devices were based on silicon (Si)semiconductor devices, which are generally quite efficient in theoperating voltage range below 480 Vac and temperatures below 50° C. Forelectric utility applications, these devices suffer from a number oflimitations, including low blocking voltage (≦10 KV), low switchingspeeds (≦2 KHz) and limited junction-operating temperatures (≦150° C.).

To penetrate the sizeable electric power system application space from480 Vac to 500 kVac with flexible power control and energy savings, newpower semiconductor technology must be developed. Because thefundamental materials limitations of Si render it inadequate,semiconductors with wider energy band-gap must be used. Silicon carbide(SiC) power control devices have been in development for at least 20years, and research-scale devices at the 10-20 kV level have beenreported, including SiC Schottky diodes and JFETs. Silicon carbide isadvantageous due to lower thermal resistance and the ability to operateat a higher temperature, as compared to silicon.

However, as the voltage level becomes higher and higher, losses in thesedevices also increase significantly, limiting the device's currenthandling capability. A semiconductor with drastically better materialsproperties is needed; one that will enable power electronics with thehighest operating temperature, greatly reduced forward conduction lossesand blocking voltage capability beyond 20 kV. Accordingly, there remainsa need in the art for improved power semiconductor devices.

SUMMARY OF THE INVENTION

The present invention provides power semiconductor devices comprising analuminum nitride (AlN) single crystalline substrate, wherein thedislocation density of the substrate is less than about 10⁵ cm⁻² and theFull Width Half Maximum (FWHM) of the double axis rocking curve for the(002) and (102) crystallographic planes is less than about 200 arcsec;and a power semiconductor structure comprising a plurality of epitaxialdoped Al_(x)Ga_(1-x)N layers overlying the aluminum nitride singlecrystalline substrate. In certain embodiments, power semiconductordevices of the invention are capable of providing breakdown fields of atleast about 5 MV/cm (e.g., at least about 10 MV/cm, at least about 15MV/cm, or at least about 20 MV/cm), blocking voltages of at least about20 kV, and/or a switching frequency of at least about 20 kHz. Exemplarypower semiconductor structures are those in the form of a Schottkydiode, a Junction Field Effect Transistors (JFET), or a Power MetalOxide Semiconductor Field Effect Transistors (MOSFET).

In certain embodiments, the substrate can be characterized by adislocation density of lower than 10⁴ cm⁻², lower than 10³ cm⁻², orlower than 10² cm⁻², The FWHM of the double axis rocking curve for the(002) and (102) crystallographic planes can be less than about 100arcsec, less than about 50 arcsec, or less than about 25 arcsec. Thealuminum nitride single crystalline substrate is typically prepared byphysical vapor transport.

In one exemplary embodiment, the power semiconductor structure is in theform of a Schottky diode comprising a relatively lightly doped N-typedrift region comprising one or more epitaxial Al_(x)Ga_(1-x)N layersadjacent to a relatively heavily doped N+ region comprising one or moreepitaxial Al_(x)Ga_(1-x)N layers. The value of x can vary, depending onthe location of the Al_(x)Ga_(1-x)N layer, with typical values of xbeing between about 0 and about 0.8 in the N+ region and greater thanabout 0.7 or greater than about 0.8 in the drift region.

The present invention also provides a method of forming a powersemiconductor device, which comprises receiving an aluminum nitridesingle crystalline substrate, wherein the dislocation density of thesubstrate is less than about 10⁵ cm⁻² and the FWHM of the double axisrocking curve for the (002) and (102) crystallographic planes is lessthan about 200 arcsec; depositing a plurality of epitaxial dopedAl_(x)Ga_(1-x)N active layers on the aluminum nitride single crystallinesubstrate; removing at least a portion of the aluminum nitride singlecrystalline substrate; and forming metal electrode layers in contactwith the doped Al_(x)Ga_(1-x)N active layers. Exemplary depositiontechniques include molecular-beam epitaxy (MBE), metal organic chemicalvapor deposition (MOCVD), and Hydride Vapor Phase Epitaxy (HVPE). In oneembodiment where the power semiconductor structure is in the form of aSchottky diode, the depositing step comprises depositing one or morerelatively heavily doped N+ Al_(x)Ga_(1-x)N layers on the aluminumnitride single crystalline substrate and depositing one or morerelatively lightly doped N-type Al_(x)Ga_(1-x)N layers on the relativelyheavily doped N+ Al_(x)Ga_(1-x)N layers.

BRIEF DESCRIPTION OF THE DRAWINGS

Having thus described the disclosure in the foregoing general terms,reference will now be made to the accompanying drawings, which are notnecessarily drawn to scale, and wherein:

FIG. 1 illustrates an exemplary Schottky diode according to theinvention;

FIG. 2 illustrates the effect of a reverse bias applied to the anode ofthe Schottky diode of FIG. 1;

FIG. 3 illustrates the structure of a Schottky diode grown on a singlecrystal AlN substrate as discussed in the Experimental; and

FIG. 4 graphically illustrates the current-voltage curve for theexemplary device discussed in the Experimental.

DETAILED DESCRIPTION OF THE INVENTION

The present disclosure will now be described more fully hereinafter withreference to exemplary embodiments thereof. These exemplary embodimentsare described so that this disclosure will be thorough and complete, andwill fully convey the scope of the disclosure to those skilled in theart. Indeed, the present disclosure may be embodied in many differentforms and should not be construed as limited to the embodiments setforth herein; rather, these embodiments are provided so that thisdisclosure will satisfy applicable legal requirements. As used in thespecification, and in the appended claims, the singular forms “a”, “an”,“the”, include plural referents unless the context clearly dictatesotherwise.

Embodiments of the present invention relate to power semiconductordevices. As used herein, the term “power semiconductor device” isintended to refer to devices constructed of semiconductor material andadapted for control or conversion of electric current, includingswitches and rectifiers. These devices can be two-terminal orthree-terminal devices and either majority carrier or minority carrierdevices, specifically including Schottky diodes, Junction Field EffectTransistors (JFET), Power Metal Oxide Semiconductor Field EffectTransistors (MOSFET), thyristors, Bipolar Junction Transistors (BJT),PIN diodes, and Insulated Gate Bipolar Transistors (IGBT). Power diodes(including Schottky diodes) are a particularly important class of suchdevices, which provide rectification of power and which are used in avariety of applications including electroplating, anodizing, batterycharging, welding, power supplies (dc and ac), and variable frequencydrives.

In accordance with the present invention, the power semiconductordevices are fabricated on single crystalline AlN substrates with lowdislocation density prepared by physical vapor transport (PVT). AlN hasa very high critical electric field, which is related to achieving ahigh blocking voltage in the off-state. Both critical electric field andblocking voltage are strongly reduced by material with a highdislocation density. Accordingly, because the MN substrates used in thepresent invention exhibit a very low dislocation density, the substratescan be used to produce power semiconductor device structures thatrealize the exceptionally high critical field.

Although usually considered as a dielectric, AlN, as well as alloys ofAlN and GaN, display significant thermal conductivity and hold thepromise of good electronic mobility, high aluminum content, alloys ofAl_(x)Ga_(1-x)N. The combination of these favorable thermal propertieswith wide electronic band-gaps allows fabrication of high-speed powercontrol devices with exceptionally high breakdown fields. In certainembodiments, the present invention can provide majority carrier powerdevices with breakdown fields on the order of at least about 5 MV/cm, atleast about 10 MV/cm, at least about 15 MV/cm, or at least about 20MV/cm. Accordingly, power devices fabricated from Al_(x)Ga_(1-x)N(x>0.8) according to the invention have the potential to demonstrate a200:1 improvement in breakdown voltage over Si devices with the samespecific on resistance.

AlN Substrate

III-nitride semiconductor materials with a low defect density can beused to fabricate high performance power semiconductor devices.Minimizing the difference between the lattice constants of the substrateand the device layers results in a lower dislocation density throughoutthe device. Therefore, it is desirable to use AlN or GaN single crystalsas substrates for III-nitride based devices, since the use of thesenative III-nitride substrates minimizes the difference in latticeconstant between the substrate and the device layers. The use ofsubstrates with low dislocation density is preferable becausedislocations present in the substrate tend to propagate into the devicelayers.

In the present invention, AlN single crystal substrates are particularlypreferred, and such substrates can be c-plane, m-plane, a-plane, orr-plane. “Single crystal” refers to the crystal having ordered latticeatoms with one orientation in 3-D. A power semiconductor device built ona single crystal substrate will inherit the crystalline orientation ofthe substrate. By contrast, “polycrystalline” refers to the presence ofmany orientations with many grain boundaries, which are absent in thesingle crystal. As applied to the substrates of the invention, “singlecrystal substrate” refers to the presence, at a minimum, of at least onesingle crystal surface available for growth of a power semiconductordevice, which would include substrates that have a homogenous singlecrystal structure throughout its thickness as well as substrates havinga single crystal layer bonded to another substrate. Single crystallineAlN is an III-nitride semiconductor material that features a directbandgap of approximately 6 eV. This represents a larger bandgap thanother nitrides such as GaN and InN, and it is therefore possible toalloy AlN with Ga or In in order to engineer the bandgap energy.

Processes for preparing the single crystal AlN substrate can vary, butwill typically involve physical vapor transport as opposed to chemicalvapor deposition (CVD) techniques that involve chemical reaction ofprecursor molecules to form the desired material, meaning the preferredprocess involves physical transport of a vapor of the desired material(i.e., AlN) from an AlN source to a deposition location in a crucible orother crystal growth chamber. The deposition area typically includes asingle crystal AlN seed material and the growth process is typicallyconducted in an inductively-heated reactor. Seeded PVT growth processesfor growing single crystal AlN substrates suitable for use in thepresent invention are set forth, for example, in U.S. Pat. No. 7,678,195to Schlesser et al; Ehrentraut, D., & Sitar, Z. (2009) Advances in bulkcrystal growth of AlN and GaN, MRS Bulletin, 34(4), 259-265; Lu et al.(2009) Seeded growth of AlN bulk crystals in m- and c-orientation,Journal of Crystal Growth, 312(1), 58-63; and Herro et al. (2010) Growthof AlN single crystalline boules, Journal of Crystal Growth, 312 (18)2519-2521, the entire disclosure of each being hereby incorporated byreference. Single crystal AlN substrates suitable for use in the presentinvention are commercially available from HexaTech, Inc. of Morrisville,N.C. Crucibles useful in PVT crystal growth processes are set forth inU.S. Pat. No. 7,632,454 to Schlesser et al., which is also incorporatedby reference herein. See also the disclosure in U.S. Pat. No. 7,815,970to Schlesser et al. and U.S. Pat. No. 7,915,178 to Collazo et al., bothof which are incorporated by reference herein.

Evaluation of the quality of a single crystal substrate can be based onseveral measurements, including counting dislocation density. Exemplarytechniques for measuring defects in single crystal structures are knownin the art, such as those techniques set forth, for example, in Dalmauet al. (2011) Characterization of dislocation arrays in AlN singlecrystals grown by PVT, Phys. status solidi A 208 (7), 1545-7 andRaghothamachar et al. (2012) Low defect density bulk AlN substrates forhigh performance electronics and optoelectronics, Materials ScienceForum 717-720, 1287-90, both of which are incorporated by referenceherein.

One method used to characterize the lattice distortion in single-crystalwafer substrates is to directly image the dislocation in the crystal byX-ray topography by using synchrotron radiation sources. See e.g., X-RayTopography-NIST Recommended Practice Guide, National Institute ofStandards and Technology, the entire disclosure of which is herebyincorporated by reference. Dislocation density can be observed byplan-view-imaging. The dislocation density is calculated by dividing thetotal number of dislocations by the area of the view field.

The dislocation density of the single crystalline AlN substratesdescribed herein is preferably less than about 10⁵ cm⁻², more preferablyless than about 10⁴ cm⁻², and most preferably less than about 10³ cm⁻².In certain embodiments, the dislocation density of the AlN substrate isless than or equal to about 10² cm⁻².

For a sample with a relatively low dislocation density, it can benecessary to etch a mechanically polished crystal surface using, forexample, a 1:1 ratio by weight mixed solution of potassium hydroxide andsodium hydroxide, at 300° C. for 5 to 10 min. After etching, the etchedsurface is observed and the number of etch pits is counted by electronmicroscopy or optical microscopy. The dislocation density is thenestimated by dividing the number of observed etched pits by the area ofthe view field.

Imperfect surface preparation of the substrate can also increase thedislocation density of the resulting device. Accordingly, surfacepreparation techniques can be utilized to obtain an ideal surface forepitaxial growth without generating new dislocations from the interface.In an embodiment of the present invention, the AlN substrate surface isprepared by grinding, followed by chemo-mechanical polishing to reduceresidual surface roughness. AlN substrate treatment processes can alsoinclude reactive ion etching or wet etching using an alkaline solution.Details of the polishing process are not particularly limiting to thepresent invention. Planarization processing by dry etching can also beused. A very smooth and flat substrate surface, consisting of atomicsteps, is desirable regardless of the surface preparation method used.

High resolution X-ray diffraction (HRXRD) is another standard methodused to characterize the lattice distortion in single crystalsubstrates. See e.g., NIST High Resolution X-Ray Diffraction StandardReference Material: SRM 2000 link:http://www.nist.gov/manuscript-publication-search.cfm?pub_id=902585, theentire disclosure of which is hereby incorporated by reference. Seealso, High Resolution X-Ray Diffractometry And Topography by D. K.Bowen, B. K. Tanner, CRC Press 1998, the entire disclosure of which ishereby incorporated by reference. The dislocation density can becharacterized by FWHM of the rocking curve (RC) in HRXRD measurement. Anarrow peak suggests less lattice disorder in the crystal, which meanslow dislocation density. Specifically, the FWHM of X-ray RCs for thecrystallographic plane of AlN substrates used in the present inventionis preferably less than about 200 arcsec, less than about 100 arcsec,less than about 50 arcsec, or less than about 25 arcsec. Exemplaryranges include about 1 to about 200 arcsec, about 5 to about 50 arcsec,and about 10 to about 25 arcsec. XRD measurements can be performed witha Philips X'Pert MRD diffractometer using Cu Kα₁ radiation of γ=1.540 56Å. The x-ray tube can be in point focus set to 40 kV 45 mA. Thedouble-axis configuration can utilize a Ge (2 2 0) four-bouncemonochromator and an open detector. The spot size of the X-ray beam canbe approximately 10 mm.

Power Semiconductor Device Structures

The precise structure and method of preparation for the powersemiconductor devices of the invention can vary, but will typicallyinvolve epitaxial growth, mounting, and packaging processes known in theart. Each power semiconductor device according to the invention is grownon the AlN substrates described herein and contains multiple activelayers in the form of N-type and/or P-type semiconductor layers (e.g.,Si-doped Al_(x)Ga_(1-x)N layers).

The exact device structure will depend on the device type. For example,a MOSFET according to the invention can have, for example, aconventional four-terminal structure including a gate, source, drain,and body as known in the art. A Schottky diode structure according tothe invention can have, for example, the structure shown in FIG. 1, withan N-type lightly doped drift layer formed on an N+ type heavily dopedlayer. At least a portion of the surface of the N-type doped drift layeris in contact with a metal layer as an anode. The contact region betweenthe metal layer (labeled Schottky metal) and the N-type doped driftlayer forms a Schottky barrier. At least a portion of the surface of theN+ type doped layer is in contact with an ohmic metal layer as acathode. Exemplary electrode metals include titanium, aluminum, andgold, as well as combinations thereof. Although the illustrated deviceis vertically arranged, laterally arranged diode structures could alsobe used in the present invention.

The N+ type contact region of the Schottky diode will typically consistof one or more Si-doped Al_(x)Ga_(1-x)N layers, where x is between about0 and about 0.8 (e.g., about 0.2 to about 0.8). The N-type drift regionof the Schottky diode will typically consist of one or more Si-dopedAl_(y)Ga_(1-y)N layers, where y is between about 0 and about 1.Advantageously, y is greater than about 0.7 or greater than about 0.8(including pure AlN) in the drift region.

When a reverse bias is applied to the anode, as shown in FIG. 2, thedevice is in the off-state; the applied voltage is supported by adepletion region in the drift region which is formed at the interfacebetween the Schottky metal and N-drift region and expanded toward thecathode. The maximum electric field (E_(M)) is at the interface betweenthe Schottky metal and the N-drift region; the applied bias can beincreased until the maximum electric field reaches the critical electricfield (E_(C)) of the semiconductor.

As mentioned above, the breakdown voltage is determined by the criticalelectric field of semiconductor. Wide band gap materials such as AlN,GaN, and SiC have higher critical electric field than Si. This meansthat the AlN or AlGaN Schottky diodes of the invention can achievehigher breakdown voltage compared with Si Schottky diodes. The relationbetween the breakdown voltage (BV) and the specific resistance of driftregion (R_(D)) is given by

$R_{D} = \frac{4{BV}^{2}}{{\mu ɛ}\; E_{C}^{3}}$

where μ is the carrier mobility, c is the permittivity, and E_(C) is thecritical electric field of semiconductor. Therefore, the Schottky diodebased on AlN or AlGaN can achieve a high breakdown voltage with a lowspecific resistance compared with the device based on Si.

Method of Fabricating Power Semiconductor Devices of the Invention

The power semiconductor device structures discussed herein can be formedby epitaxial growth processes known in the art, such as molecular-beamepitaxy (MBE), metal organic chemical vapor deposition (MOCVD), HydrideVapor Phase Epitaxy (HVPE), liquid phase epitaxy (LPE), or the like.MOCVD processes are preferable in order to control the thickness of thedevice layers as well as the incorporation of dopants. Methods forforming doped layers of AlGaN alloys are discussed, for example, in U.S.Pat. Nos. 6,888,170; 6,953,740; 7,482,191; and 7,485,901, all to Schaffet al, which are incorporated by reference herein.

Many single crystalline substrates are C-plane substrates. Regardless ofthe epitaxy method used, the deposited layers become a continuation ofthe substrate's crystal structure. Therefore, in order to achieve a lowdislocation density throughout all layers of the device, a substratewith a low dislocation density is necessary as described above.

Control of carbon and oxygen incorporation during device layer growth isimportant and can be accomplished by utilizing “carbon-free” processes,such as MBE and HVPE, and by utilizing supersaturation schemes forcontrol of carbon by MOCVD. In certain embodiments, the carbonconcentration in the active layers is maintained below about 10¹⁶ cm⁻³.For AlGaN films grown by MOCVD, it is preferred to obtain controllablen-type carrier concentrations in the 5×10¹⁶-5×10¹⁷ cm⁻³ range forhigh-Al content films. Quantum wells of Si-doped Al_(x)Ga_(1-x)N (xis >0.7 or >0.8) can be utilized as the drift region in the powersemiconductor devices of the invention. Following active layerdeposition, the single crystal substrate can be at least partiallyremoved or thinned if desired, and metal electrode layers are formed incontact with the active layers.

Transmission electron microscopy (“TEM”) is a standard method used tocharacterize the lattice distortion in substrate and device layers. Thedislocation in the crystal can be directly imaged by using electronbeams transmitted through ultra thin substrate specimens. An image isformed from the interaction of the electrons transmitted through thespecimen.

In various embodiments of the present invention, cross-sectional TEManalysis of the device layers can be used to confirm that no additionaldislocations are formed at the substrate-device layer interface, and,therefore, it can be concluded that the dislocation density in thedevice layers is essentially identical to that of the substrate.

Method of Using Power Semiconductor Devices of the Invention

The power semiconductor devices of the invention could be used in anyapplication known for such devices, including applications inelectricity distribution. The next major revolution in power electronicsis expected to involve use of high-frequency power conversion techniquesin the electricity distribution power grid (medium voltage system) andthus displace the traditional 60 Hz electromagnetic transformer.However, this requires high-voltage, high-frequency power semiconductordevices. AlN based devices of the type described herein are ideal forbuilding a device that can operate at >20 kV and switch at >20 kHz. Forexample, power semiconductor devices of the invention could be employedas high-voltage switches and/or high-voltage rectifiers, even thoseneeding to be 20 kV-class devices, and such devices would be expected tohave an ultra-low reverse recovery loss.

EXPERIMENTAL

Aspects of the present invention are more fully illustrated by thefollowing example, which is set forth to illustrate certain embodimentsof the invention and not to be construed as limiting thereof.

A Schottky diode structure of FIG. 3 was epitaxially grown on a singlecrystal AlN substrate fabricated from an AlN boule grown usingHexaTech's PVT process, which is routinely capable of producing materialwith an average dislocation density lower than 10⁴ cm⁻². TEM imaging ofa cross-section of the diode structure revealed sharp and abruptinterfaces between lawyers with no visible dislocations.

The Si-doped contact region grown on the substrate is characterized ashaving the composition Al_(0.79)Ga_(0.21)N and the drift region grown onthe contact region was lightly doped AlN. HRXRD measurements indicatedthat the drift region was 125 nm thick and the contact region was 522 nmthick.

FIG. 4 provides the I-V curve for the experimental device. As shown, thedevice demonstrated very low leakage current under reverse bias.Additionally, the breakdown field of the experimental device wasmeasured under several conditions: (1) in air; (2) under vacuum; and (3)surface “passivated” with a FOMBLIN® lubricant. The measured breakdownfield was approximately 5 MV/cm in each case (the tested diode in 1 mtorr gave the best performance of 5.7 MV/cm), which significantlyexceeds the theoretical maximum breakdown field of SiC. It is believedthat the measured breakdown value resulted from a surface breakdown andis not indicative of the theoretical breakdown field for an optimizeddevice, which could exceed about 15 MV/cm.

Many modifications and other aspects of the disclosure set forth hereinwill come to mind to one skilled in the art to which the disclosurepertains having the benefit of the teachings presented in the foregoingdescriptions and the associated drawings. Therefore, it is to beunderstood that the disclosure is not to be limited to the specificaspects disclosed and that modifications and other aspects are intendedto be included within the scope of the claims. Although specific termsare employed herein, they are used in a generic and descriptive senseonly and not for purposes of limitation.

What is claimed is:
 1. A power semiconductor device, comprising: analuminum nitride single crystalline substrate, wherein the dislocationdensity of the substrate is less than about 10⁵ cm⁻² and the Full WidthHalf Maximum (FWHM) of the double axis rocking curve for the (002) and(102) crystallographic planes is less than about 200 arcsec; and a powersemiconductor structure comprising a plurality of epitaxial dopedAl_(x)Ga_(1-x)N layers overlying the aluminum nitride single crystallinesubstrate.
 2. The power semiconductor device of claim 1, wherein thedislocation density of the substrate is lower than 10⁴ cm⁻².
 3. Thepower semiconductor device of claim 1, wherein the dislocation densityof the substrate is lower than 10³ cm⁻².
 4. The power semiconductordevice of claim 1, wherein the dislocation density of the substrate islower than 10² cm⁻².
 5. The power semiconductor device of claim 1,wherein the FWHM of the double axis rocking curve for the (002) and(102) crystallographic planes is less than about 100 arcsec.
 6. Thepower semiconductor device of claim 1, wherein the FWHM of the doubleaxis rocking curve for the (002) and (102) crystallographic planes isless than about 50 arcsec.
 7. The power semiconductor device of claim 1,wherein the FWHM of the double axis rocking curve for the (002) and(102) crystallographic planes is less than about 25 arcsec.
 8. The powersemiconductor device of claim 1, wherein the power semiconductorstructure is in the form of a Schottky diode, a Junction Field EffectTransistors (JFET), or a Power Metal Oxide Semiconductor Field EffectTransistors (MOSFET).
 9. The power semiconductor device of claim 1,wherein the power semiconductor structure is in the form of a Schottkydiode comprising a relatively lightly doped N-type drift regioncomprising one or more epitaxial Al_(x)Ga_(1-x)N layers adjacent to arelatively heavily doped N+ region comprising one or more epitaxialAl_(x)Ga_(1-x)N layers.
 10. The power semiconductor device of claim 9,wherein at least one layer of doped Al_(x)Ga_(1-x) N has a value for xgreater than about 0.7.
 11. The power semiconductor device of claim 1,wherein the aluminum nitride single crystalline substrate is prepared byphysical vapor transport.
 12. The power semiconductor device of claim 1,wherein the device is characterized by one or more of the following: abreakdown field of at least about 5 MV/cm; a blocking voltage of atleast about 20 kV; and a switching frequency of at least about 20 kHz.13. A method of forming a power semiconductor device, comprising:receiving an aluminum nitride single crystalline substrate, wherein thedislocation density of the substrate is less than about 10⁵ cm⁻² and theFull Width Half Maximum (FWHM) of the double axis rocking curve for the(002) and (102) crystallographic planes is less than about 200 arcsec;depositing a plurality of epitaxial doped Al_(x)Ga_(1-x)N active layerson the aluminum nitride single crystalline substrate; and forming metalelectrode layers in contact with the doped Al_(x)Ga_(1-x)N activelayers.
 14. The method of claim 13, wherein the depositing stepcomprises molecular-beam epitaxy (MBE), metal organic chemical vapordeposition (MOCVD), or Hydride Vapor Phase Epitaxy (HVPE).
 15. Themethod of claim 13, wherein the power semiconductor structure is in theform of a Schottky diode and the depositing step comprises depositingone or more relatively heavily doped N+ Al_(x)Ga_(1-x)N layers on thealuminum nitride single crystalline substrate and depositing one or morerelatively lightly doped N-type Al_(x)Ga_(1-x)N layers on the relativelyheavily doped N+Al_(x)Ga_(1-x)N layers.